柴进论文题目：硅微通道阵列氧化动力学及应力问题研究

研究内容

1. 硅微通道阵列结构氧化动力学特性分析；

2. 厚二氧化硅层氧化及工艺问题研究；

3. 应力产生的微观机制分析研究；

4. 应力问题的解决方案与实验研究

参考文献

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